产品展示
Sputtering System
滚筒至滚筒式溅射
개요
- 为增加柔软胶卷的粘贴度,广泛使用Roll to Roll Spurter。
滚筒式散热器的适用领域因基板种类和产品不同而不同。
특징
- - 解决单位
- 倒灌装置
- 增置装置(Cathode system)
- 主鼓小分队
- 滚筒小分队
- 控制系统;
- Maintenance/测量装置(选择)
사양
Application
Web sputtering process on Both sides or Single side of flexible material
Number of Coating Sources
1 ~ 5 Sources / Drum
Substrate Materials
PET, PEN, PI, PA, PC,TAC, Metal Foils, etc.
Film Width (㎜)
500 ~ 1,350
Substrate thickness for POLymers (㎛)
25 ~ 500
Max Roll Diameter (㎜)
800
Substrate Speed (m/min)
0.5 ~ 25
Tension (N)
70 ~ 700
Base Pressure (Torr)
2 × 10-6
Coating drum temperature (℃)
-15 to 150